Wafer Flatness Detection
To verify that the wafer is perpendicular to the sensing axis
Description
The MINI-BEAM Expert diffuse sensor, with its visible red beam, detects the position of specular surfaces. The Expert TEACH-mode programming enables the user to specify a small range of acceptable distance between the sensor and object, so it can detect high spots of an improperly seated wafer as it passes on the carousel.
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MINI-BEAM Expert Series |
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