Wafer Cassette Detection under Water
To sense the presence of a wafer cassette on a conveyor submerged in water
Description
Silicon wafers are transported from one process to another in cassette on a conveyor that is totally submerged in de-ionized water. A D12 sensor has teflon-encapsulated opposed-mode fibers that are located on either side of the conveyor. When the cassette is present, the opposed beam is broken.
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D12 Series |
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