Wafer Protrusion and Home Position Detection
To verify that no wafer protrudes from the outer limits of a cassette, and indicate that the robot is in home position.
Description
The opposed M12 laser emitter and S12 receiver pair are positioned to detect whether any wafers protrude from the open side of a transfer cassette, before the transfer door is closed.
A PicoDot, with its precise focus, looks for a feature on the wafer blade to indicate that the robot is in home position.
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