Semiconductor

Semiconductor Hero

Solutions for Unique and Demanding Semiconductor Equipment Applications

Semiconductor equipment design engineers throughout the world rely on Banner’s broad product offering, capacity for rapid product customization, and application solution experts to solve their most challenging applications. 

From LED lighting designed specifically for semiconductor equipment to the world’s fastest fiber amplifier enabling high speed wafer center finding, Banner Engineering has the semiconductor industry experience necessary and product portfolio to solve unique applications.

Applications

Machine Safeguarding in an ESD-Sensitive Environment
Machine Safeguarding in an ESD-Sensitive Environment

In this application, machine operators require access to the wafer carrier station. The EZ-SCREEN ESD safety light curtain system is configured to safeguard the process and operator using emitters, receivers and mirrors to enclose three sides of the station. Safety light curtains allow quicker, easier access than physical barriers while preventing machine movement if the operator reaches into the hazardous zone.

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Wafer Center Detection with DF-G2
Wafer Center Detection with DF-G2

By pairing Banner’s DF-G2 with four opposed mode PLIS-1 fiber optics, operators can ensure the wafer is on the robotic arm’s end effecter correctly so that no damage is done when passing it into the chamber. As the robotic arm moves the wafer into the chamber, the fiber optic beams will break and an algorithm will calculate the exact wafer position based on when the fiber sensing beams are broken. Banner’s DF-G2 has a fast response time and can quickly measure and detect the wafer’s center.

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Integrated Circuit Lead Frame Detection with a D10
Integrated Circuit Lead Frame Detection with a D10

The lead frame of an integrated circuit moves on a U-shaped channel toward the cassette that holds multiple frames. The D10 Expert Analog/Discrete sensor detects the leading and trailing edge, to signal to the cassette that the lead frame is approaching. The sensor operates in the opposed mode, because large differences in reflectivity of frame materials make diffuse sensing impossible.

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Wafer Mapping with Bargraph Display
Wafer Mapping with Bargraph Display

The fibers of the D10 Expert sensor move along the stack of wafers in the cassette, mapping which slots are occupied and which are empty. The bargraph displays the sensor's status.

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Lead Frame Detection in a Magazine
Lead Frame Detection in a Magazine

In the process of die bonding and wire bonding, lead frames are conveyed in a tall vertical cassette. To increase throughput, the cassettes are inspected to determine if a lead frame is present in each slot. Because the lead frame can be as thin as 0.1 mm, it can be difficult to sense. The VS1 convergent sensor easily senses this thin profile, as well as non-reflective plastic ball grid arrays (PBGA).

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DF-G2 Series High Speed Fiber Optic Amplifier
DF-G2 Series High Speed Fiber Optic Amplifier

Fiber amplifier with IO-Link capability for high speed (10 μs) for applications like part counting or registration mark detection. Output: NPN or PNP.

Q4X Series Rugged Laser Distance Sensor
Q4X Series Rugged Laser Distance Sensor

Rugged Q4X laser distance sensor solves many challenging applications and comes in a rugged IP69K rating with FDA food grade stainless steel housing.

LE Series 1 m Range Laser Displacement Sensor
LE Series 1 m Range Laser Displacement Sensor

LE's measurement accuracy, ready to measure distances of 100 to 1000 mm, is suitable for controlling, sorting, and inspection tasks in quality control.

LED Strip Light: WLS27 Series
WLS27 Series: Shatterproof LED Strip Light

WLS27 LED strip lights are protected by a shatterproof copolyester shell and a redundant sealing method prevents water ingress. Each strip light provides brilliant, even illumination in difficult environments.

Expandable Safety Controller: XS26 Series
Expandable Safety Controller: XS26 Series

With the option to add up to eight I/O expansion modules, the XS26-2 expandable safety controller has the capacity to adapt to a variety of machines, including large scale machines with multiple processes. Program in minutes with easy-to-use configuration software.

DF-G1 Series General Purpose Fiber Optic Amplifier
DF-G1 Series General Purpose Fiber Optic Amplifier

Fiber amplifier with IO-Link capability ideal for general purpose and error proofing. Has simple set-up and configuration. Output: NPN or PNP.

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