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晶圓盒中的晶圓定位
應用挑戰
偵測以不正確方式裝入晶圓盒的晶圓
解決方案
PicoDot感測器被定位成可同時感測同一片晶圓的邊緣。如果只有一個感測器偵測到晶片邊緣，則該晶片很有可能以歪斜角度或同時插入兩個槽。
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