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利用DF-G2進行晶圓中心偵測
應用挑戰
在半導體業，檢測晶圓位置至關重要。晶圓 價值高達100,000美元，所涉及的機器成本高達數百萬美元。確保正確的晶圓佈置可以防止損壞高價格的晶圓和設備。透過偵測晶圓的中心，操作人員可以確保在晶圓被放置在真空室中時，晶片被正確定位在機械臂上。
在半導體業
解決方案
透過將Banner的DF-G2與四個對照模式的PLIS-1光纖配對，操作人員可以確保晶圓正確置于機械臂端部的執行器上，以便在將其送入腔室時不會造成損壞。在機械手臂將晶圓移動到真空室中時，光纖光束將中斷，並且算法將基於光纖感測光束的中斷時間來計算精確的晶圓位置。
Banner的DF-G2具有快速的反應時間，可以快速測量和偵測晶圓的中心。如果晶圓偏離中心，機器手臂有時間將晶片調整到正確的位置，以防止損壞晶圓和設備。
對照模式PLIS-1光纖具有90°視角，其雷達波形非常緊密，可精確測量晶圓定位。這些光纖也適用於高溫環境，例如半導體製造使用的真空腔室區域。由於區域的空間有限，配有光纖的遠程放大器提供了最佳解決方案。
特色產品
DF-G2系列高速光纖放大器
具有IO-Link功能的光纖放大器，用於高速（10μs），適用於零件計數或色標偵測等應用。輸出：NPN或PNP。