Semiconductor

Semiconductor Hero

Solutions for Unique and Demanding Semiconductor Equipment Applications

Semiconductor equipment design engineers throughout the world rely on Banner’s broad product offering, capacity for rapid product customization, and application solution experts to solve their most challenging applications. 

From LED lighting designed specifically for semiconductor equipment to the world’s fastest fiber amplifier enabling high speed wafer center finding, Banner Engineering has the semiconductor industry experience necessary and product portfolio to solve unique applications.

Applications

Machine Safeguarding in an ESD-Sensitive Environment
Machine Safeguarding in an ESD-Sensitive Environment

In this application, machine operators require access to the wafer carrier station. The EZ-SCREEN ESD safety light curtain system is configured to safeguard the process and operator using emitters, receivers and mirrors to enclose three sides of the station. Safety light curtains allow quicker, easier access than physical barriers while preventing machine movement if the operator reaches into the hazardous zone.

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Wafer Center Detection with DF-G2
Wafer Center Detection with DF-G2

By pairing Banner’s DF-G2 with four opposed mode PLIS-1 fiber optics, operators can ensure the wafer is on the robotic arm’s end effecter correctly so that no damage is done when passing it into the chamber. As the robotic arm moves the wafer into the chamber, the fiber optic beams will break and an algorithm will calculate the exact wafer position based on when the fiber sensing beams are broken. Banner’s DF-G2 has a fast response time and can quickly measure and detect the wafer’s center.

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Bond Wire Break Detection with a Fiber Optic Pair
Bond Wire Break Detection with a Fiber Optic Pair

A pair of fiber optics in opposed mode are located below the bond wire. When the wire breaks and falls through the beam, an adjustable one-shot output pulse is energized. This application does not require a consistent positioning of the bonding wire.

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Wafer Mapping with Bargraph Display
Wafer Mapping with Bargraph Display

The fibers of the D10 Expert sensor move along the stack of wafers in the cassette, mapping which slots are occupied and which are empty. The bargraph displays the sensor's status.

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Integrated Circuit Lead Frame Detection with a D10
Integrated Circuit Lead Frame Detection with a D10

The lead frame of an integrated circuit moves on a U-shaped channel toward the cassette that holds multiple frames. The D10 Expert Analog/Discrete sensor detects the leading and trailing edge, to signal to the cassette that the lead frame is approaching. The sensor operates in the opposed mode, because large differences in reflectivity of frame materials make diffuse sensing impossible.

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Fiber Optic Amplifier: DF-G2 Series
Fiber Optic Amplifier: DF-G2 Series

Designed to achieve the world’s fastest response rate, the DF-G2 fiber optic amplifier can achieve 10 microsecond response time with 5 microsecond repeatability. Output options include discrete, dual discrete, and IO-Link communication.

Rugged Laser Distance Sensor: Q4X Series
Rugged Laser Distance Sensor: Q4X Series

The rugged Q4X laser distance sensor offers superior performance and solves many challenging applications across a variety of materials, surfaces and colors. Discrete, analog, clear object, and IO-Link models are available.

Laser Measurement Sensor: LE Series
Laser Measurement Sensor: LE Series

The LE laser measurement sensor is ready to measure widths of 100 to 1000 mm right out of the box.

LED Strip Light: WLS27 Series
LED Strip Light: WLS27 Series

WLS27 LED strip lights are protected by a shatterproof copolyester shell and a redundant sealing method prevents water ingress. Each strip light provides brilliant, even illumination in difficult environments.

Expandable Safety Controller: XS26 Series
Expandable Safety Controller: XS26 Series

With the option to add up to eight I/O expansion modules, the XS26-2 expandable safety controller has the capacity to adapt to a variety of machines, including large scale machines with multiple processes. Program in minutes with easy-to-use configuration software.

Fiber Optic Amplifier: DF-G1 Series
Fiber Optic Amplifier: DF-G1 Series

High performance dual-display fiber amplifier, features simple set-up and configuration. Output options include NPN, PNP, or PNP with IO-Link Communication.