Wafer Protrusion Detection
To detect when a wafer is protruding from a wafer cassette
Description
A wafer protruding from a cassette can be broken or damaged, decreasing throughput and interrupting the process. The PICO-AMP amplifier, used with remote sensors, is a very small sensor with a small (1.5 mm) effective beam that can detect protruding wafers. The maximum opposed range is 300 mm.
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PICO-AMP MD14 Series |
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