All Semiconductor Solutions

  1. Semiconductor Process Tool Illumination

    Banner’s WLS27 are rugged LED strip lights specifically developed to provide brilliant, even illumination in challenging environments and compact spaces. They have a space-saving, aerodynamic design, are fully encapsulated in a protective shell, and come in a broad range of illumination color options. Machine designers can install WLS27 LED strip lights wherever they are best suited to illuminate a work area without making costly or time consuming modifications to the lights.

  2. Machine Safeguarding in an ESD-Sensitive Environment

    In this application, machine operators require access to the wafer carrier station. The EZ-SCREEN ESD safety light curtain system is configured to safeguard the process and operator using emitters, receivers and mirrors to enclose three sides of the station. Safety light curtains allow quicker, easier access than physical barriers while preventing machine movement if the operator reaches into the hazardous zone.

  3. Wafer Center Detection with DF-G2

    By pairing Banner’s DF-G2 with four opposed mode PLIS-1 fiber optics, operators can ensure the wafer is on the robotic arm’s end effecter correctly so that no damage is done when passing it into the chamber. As the robotic arm moves the wafer into the chamber, the fiber optic beams will break and an algorithm will calculate the exact wafer position based on when the fiber sensing beams are broken. Banner’s DF-G2 has a fast response time and can quickly measure and detect the wafer’s center.

  4. Monitoring Environmental Conditions

    A semiconductor fab needs to monitor temperature, relative humidity, and oxygen levels at multiple points within their processing plant, along a 2 kilometer long process piping system. They require a solution that monitors temperature, relative humidity, and oxygen levels, provides a location for the monitoring points, and collects all data to a central point and interfaces with their SCADA system. The solution needs to create an efficient, safe work environment for all employees. With over 2 kilometers of underground tunnel piping systems, installing cable to each monitoring location is cost prohibitive.

  5. Wafer Mapping in a Cassette

    PicoDot sensors are positioned to sense the edge of the same wafer at the same time. If only one sensor detects a wafer edge, that wafer is most likely inserted at an angle, or cross slotted.

  6. Wafer Mapping with Bargraph Display

    The fibers of the D10 Expert sensor move along the stack of wafers in the cassette, mapping which slots are occupied and which are empty. The bargraph displays the sensor's status.

  7. Bond Wire Break Detection with a Fiber Optic Pair

    A pair of fiber optics in opposed mode are located below the bond wire. When the wire breaks and falls through the beam, an adjustable one-shot output pulse is energized. This application does not require a consistent positioning of the bonding wire.

  8. Integrated Circuit Lead Frame Detection with a D10

    The lead frame of an integrated circuit moves on a U-shaped channel toward the cassette that holds multiple frames. The D10 Expert Analog/Discrete sensor detects the leading and trailing edge, to signal to the cassette that the lead frame is approaching. The sensor operates in the opposed mode, because large differences in reflectivity of frame materials make diffuse sensing impossible.

  9. Sensing in a High-Speed Chip Shooter

    The bussable power feature of the D10 Expert allows for up to 16 sensors to be wired together and powered through one power supply, reducing the amount of wiring required and making it possible to use multiple sensors without needing multiple connection points. Space can be further conserved by mounting the sensors together on a DIN rail, utilizing fiber optics to monitor multiple inspection points in a confined space.