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カセット内のウェハーマップ
課題
カセットに不適切に装填された半導体ウェハーを検出する
解決策
PicoDotセンサは、同じウェハーのエッジを同時に検知するように複数配置されます。1つのセンサのみでウェハーのエッジが検出された場合、そのウェハは斜めに挿入されるか、クロススロットで挿入される可能性がとても高くなります。
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